Ideal for transmission inspection of silicon wafers, etc.
A characteristic of 1100nm-wavelength infrared light of is that it can transmit through silicon material.
Transmission inspections can be done even without an expensive infrared cameras such as InGaAs cameras due to the sensitivity range CMOS cameras cover.
Please also consider other infrared lighting series and the long wavelength infrared lighting 3 series.
| Model |
Input Current |
Light Type |
Peak Wavelength |
| IHVE-21IR-1100 |
– |
Coaxial Light |
1100nm |
※Please also consider other infrared lighting series and the long wavelength infrared lighting 3 series.
What is infrared light?
Introducing an inspection example of circuit pattern inspection\ by infrared lighting.
Infrared lighting has a longer wavelength than visible light and is invisible to the human eye.
Infrared light has a very low scattering rate compared to ultraviolet light and visible light, so it has a high transmittance rate allowing it to transmit through liquids and ink.
In particular, light with a wavelength of 1100nm passes through silicon. Also, unlike halogen, the wavelength range is limited, so it does not affect photosensitive objects.
Infrared wavelength distribution graph
Imaging example: Observation of circuit patterns of a silicon wafer
Regarding silicon wafers, infrared wavelengths of around 1000nm start transmitting through them and infrared wavelengths of 1100nm transmit constantly even though light of short wavelengths will not transmit through them.
Regarding silicon wafers, infrared wavelengths of around 1000nm start transmitting through them and infrared wavelengths of 1100nm and above transmit constantly even though light of short wavelengths will not transmit through them.
Therefore, while infrared lighting of 850nm or 940nm is almost invisible, transmission inspection can be done from infrared lighting of 1100nm or more.
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|
Imaging environment
Camera: CMOS monochrome camera
Lens: Telecentric lens x 1
CIRCUIT BOARD：FLEXIBLE PRINTED CIRCUIT BOARD
The board is fixed on the wafer and evaluated as having a circuit on the wafer.
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□850nm
Irradiation light with a wavelength of 850nm cannot transmit through the silicon wafer and looks black. |
|
□1100nm
Irradiation light with a wavelength of 1100nm transmits through the silicon wafer and the pattern of the printed circuit board can be visualized. |
|
□1200nm
Irradiation light with a wavelength of 1200nm looks black due to being out of range of the sensitivity of the CMOS camera. |
